FOUP INSPECTION SYSTEM

FOUP/FOSB Automation Inspection System


Maker
Rite Track

Model
EAGLEi 300

Dimensions
W2000 x D1700 x H1840(mm)

Weight
900kg

Application
300mm FOUP/FOSB in conformity to SEMI

Utility
*Electricity : AC200~240V
*Air : 0.75MPa
(3/8 inch Bulkhead union Fitting)

FEATURES


  • Automatically verify key selective 300mm wafer carrier dimensions
  • Flexibility to run 300mm FOUP, FOSB, and a selection of recipe functions, next to 150mm and 200mm carriers
  • Six Sigma repeatable measurements
  • Fast & Easy with full auto and manual operations
  • Contact and Non‐Contact measurement applications
  • Information pad configuration identify system
  • Automated FOUB and FOSB series transfer system
  • Feature to load and unload wafers into FOUP and FOSB products
  • E84 Controller for OHT load / unload systems
  • Measuring SEMI features X31, and Z31 by non‐contact camera
  • Measuring FOUP saddle inspection requirement by non‐contact camera
  • CE Marking


BENEFITS


  • Increase yields using only in‐tolerance carriers
  • Quickly identify problem carriers
  • Reduces carrier to equipment related downtimes issues
  • Improve carrier interoperability detections
  • Carrier size flexibility
  • Equipped with 99.97% 0.3um HEPA for cleanroom compatibility design
  • Automated measurement data collection system
  • Easy‐to‐use dedicated Microsoft Windows® 8.1 Pro menu system
  • Integrated machine vision system – with full auto on‐line operation and judgment viewing
  • Network ready Ethernet capabilities
  • Four (4) independent light sources
  • Compliance to: SEMI S2‐0715; SEMI S8‐0712; SEMI S10‐0815; SEMI S14‐0309; SEMI S22, and CE marking
  • Operations and Maintenance manuals on CD‐ROM provided

VIDEO


APPEARANCE MEASUREMENT


L.S TEC

(주)엘에스테크


주소 : 경기도 평택시 진위면 마산 9로 9

대표전화 : 031-719-8872 / 팩스 : 031-8039-4565

사업자등록번호 : 129-86-48857 


찾아오시는길

L.S TEC

(주)엘에스테크

주소 : 경기도 평택시 진위면 마산9로 9

대표 : 김봉호  사업자등록번호 : 129-86-48857
대표전화 : 031-719-8872 / 팩스 : 031-8039-4565

 


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